A Novel Trans-Scale Precision Positioning Stage Based on the Stick-Slip Effect

This article focuses on developing a novel trans-scale precision positioning stage based on the stick-slip effect. The stick-slip effect is introduced and the rigid kinematics model of the stick-slip driving is established. The forward and return displacement equations of each step of the stick-slip driving are deduced. The relationship of return displacement and the acceleration produced by friction are obtained according to displacement equations. Combining with LuGre friction model, the flexible dynamics model of the stick-slip driving is established and simulated by using Simulink software. Simulation results show that the backward displacement will reduce with the acceleration of the slider produced by dynamic friction force, the rigid kinematics model is also verified by simulation results which are explained in further detail in the article. DOI: 10.4018/ijimr.2012040101 2 International Journal of Intelligent Mechatronics and Robotics, 2(2), 1-14, April-June 2012 Copyright © 2012, IGI Global. Copying or distributing in print or electronic forms without written permission of IGI Global is prohibited. technology have been greatly restricted by the movement in small scope. Trans-scale precision positioning means that a technology has nanometer resolution and micrometers movement range (Jang, Lee, & Choi, 2008; Li et al., 2011). Therefore, trans-scale precision positioning stage has become the key technique in nanometer positioning methodology and requiring research efforts and attention. At present, trans-scale precision positioning technology is divided into four types of driving methods. They are macro-micro hybrid driving (Gloess, 2006), piezoelectric ultrasonic driving (Holmes, Hocken, & Troumper, 2000), inchworm-type driving (Roh & Kwon, 2004) and slip-stick driving (Bergander, Breguet, Schmitt, & Clavel, 2000; Edeler & Fatikow, 2011). The frontal three driving methods can carry out trans-scale movement and have high resolution, but because of their complicated structures and control, they cannot be applied in many nano-manipulation mechanisms in tight and contained space. Slip-stick driving as a new trans-scale technique has a great deal of advantages, such as large range movements, high resolutions, simple structures, small size and precision positioning. Because of its small structure and easy precision position, slip-stick driving own extensive applied foreground. The driving method and movement model of slip-stick driving have important theoretical significance and practical values. Based on such research, a novel trans-scale precision positioning stage using the stick-slip effect was developed. Stack PZT was used in the novel stick-slip precision positioning stage and applied in the trans-scale precision positioning operations, enabling the development of precision positioning methodology.